Filtration Systems

Wet Etch Modules

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SKU: N/A Category: Filtration Systems

Description
Additional information

Available Features:

Available in Polypropylene, PVDF, PFA and 316 stainless steel
Single or four-sided overflow
All molded tank construction with Integral Sparger/Boat Rack
Removable inner tank
Heat exchange coils located out of etch area for remote circulator
Available for 2″ through 12″ wafers or custom applications

Additional Features:

Teflon or PVDF heat exchange coils
Teflon heater and control
Digital flow meter to read GPM through filter element
Process timers
Nitrogen blanket and bubbler for developer
Temperature monitors and probes
Custom modules and tanks to fit your needs

Wet Etch Module
Part #	Capacity
EDM-4F	4.02 gallons / 15.22 liters – 2, 4″ carriers
EDM-5F	5.31 gallons / 20.10 liters – 2, 5″ carriers
EDM-6F	6.59 gallons / 24.95 liters – 2, 6″ carriers
EDM-4SF	3.49 gallons / 13.21 liters – 1, 4″ carriers
EDM-5SF	3.90 gallons / 14.76 liters – 1, 5″ carriers
EDM-6SF	4.18 gallons / 15.83 liters – 1, 6″ carriers
EDM-8SF	7.57 gallons / 28.66 liters – 1, 8″ carriers

	Model
Dimension	EDM-4F	EDM-5F	EDM-6F	EDM-4SF	EDM-5SF	EDM-6SF	EDM-8SF
A	21.50	26.00	26.00	18.50	18.50	18.50	18.50
B	19.50	23.50	23.50	16.00	16.00	16.00	16.00
C	10.875	13.187	15.875	8″SQ	8″SQ	8″SQ	8″SQ
D	5.25	6.75	7.75	5.25	6.75	7.75	9.00

Part #	EDM-4F, EDM-5F, EDM-6F, EDM-4SF, EDM-5SF, EDM-6SF, EDM-8SF

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